Various industries such as semiconductor, pharmaceutical or food manufacturing use cleanrooms. Therefore, the required cleanliness classes would be different for each industry. In the near future, the world standard using ISO is most likely to be established and used.
However in this catalog, the four classes of cleanliness according to US Federal Standard and JIS standard are used.
Clean
Stage |
U.S.
Federal Standard |
J.I.S.
Standard |
Stage
1 |
Class 1 - 10 |
Class 1 - 4 |
Stage
2 |
Class 100 |
Class 5 |
Stage
3 |
Class 1000 |
Class 6 |
Stage
4 |
Class 10000 - 100000 |
Class 7 |
Industrial Cleanroom Standard
US Federal Standard 209E
There are six classes from class 1 to 100,000 according to how many particles
0.5 micron diameter or larger exsists per cubic foot.
Biological Cleanroom Standard
Cleanliness are shown by four different classes per zone using
cleanliness class from A-Zone (Class 100) to D-Zone (Class 100,000).